Mechanics and Physics of Precise Vacuum Mechanisms formatIsbn:Softcover - 9789400731066 Maintenance activities cannot be performed

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Mechanics and Physics of Precise Vacuum Mechanisms formatIsbn:Softcover - 9789400731066 Maintenance activities cannot be performedIn this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical electronic, chemical, and aerospace industries is presented in a comprehensible way. Topics treated include the method of microparticles flow regulation and its determination in vacuum equipment and mechanisms of electronics; precise mechanisms of nanoscale precision