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Design and Manufacturing of Active Microsystems formatIsbn:Softcover - 9783642267383 bedarf es einer Kundenorientierung vonThis book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several
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